Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope

PDF] 100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process

Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

Allan deviation plot for SD-BAW gyroscope interfaced with customized

Resonant pitch and roll silicon gyroscopes with sub-micron-gap slanted electrodes: Breaking the barrier toward high-performance monolithic inertial measurement units

The development of micromachined gyroscope structure and circuitry technology. - Abstract - Europe PMC

PDF] 100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process

Eigenmode operation of piezoelectric resonant gyroscopes