AFM images of Al₂O₃/Gr after ALD cycles, each cycle with pre-H₂O

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a) AFM morphology and representative b) height linescan of Al2O3

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a) AFM morphology and representative b) height linescan of Al2O3

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Schematic illustration of the ALD process for depositing Al2O3 using

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ALD process: schematic of one cycle of Al2O3 ALD growth. The

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b shows a topographic image obtained by AFM of Al 2 O 3 on ReS 2

Atomic Layer Deposition (ALD) Al2O3 growth occurs by pulsing H2O and

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